Thin Films

Systems for thin films, ranging from CVD and ALD atomic layer
deposition to gas filters and heating elements for diffusion ovens.

ALD Systems

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ALD Systems (1)
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Thin-Films
AT400
ALD Systems
ANR
 
AT400 Base ALD System

Thin-Films » Deposition » ALD Systems
Up to 4" (100mm)
5 Precursor Lines
6-10 Cycles/Min